High capacity, with a transfer rate of 600 wafers/hour from load to unload.
Standardized independent modules enables simplified design, assembly, and maintenance.
Breakage detection system in tank identifies broken wafers, preventing secondary damage.
RCA
PR Strip
Gate Clean
Oxide Etch
Nitride Etch
Wafer Recycle
CoSix Selectivity Etch
NiPtSi Selectivity Etch
BEOL Post Etch Polymer Removal
High stability
Max WPH~400
Modular design
Optimized transfer system
Tel
Global