Compact footprint, modular design, convenient setup and maintenance.
High stability and reliability, high transport speed, good chamber matching.
Wafer temperature monitoring during processing, chemical recycling design, recoverable sulfuric acid.
PR Strip
CT Clean
Pre Clean
Gate Clean
Oxide Etch
Back Side Etch
Back Side Clean
Post CMP Clean
Metal Recycle
NiPt Remove
Nitride Remove
Modular design
Compact footprint
Multiple chemicals
Sulfuric acid recycling
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